Semiconductor Equipment

POU Gas Scrubber

NEW INNOVATION

AP-HPS Series

Key features

- 3 Chambers + 1 Venturi Type

 

- Chemical Neutralization Facility for Insoluble gases

▷KOH Dosing for SiH4

 

- Powder Control Unit (N₂& Water Spin Unit)

▷ No Plugging

▷ Long Maintenance Period

 

- High Pressure Generator

▷ No Blower (Fan)

Certificate

- Patent (2004.11)

- Semi-S2 & CE-mark

AP-solution

AP-MPS-DP

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